Analysis Features

Basic Statistics, Correlation Analysis, and Visualization Features

Lot-level and wafer-level statistical analysis, correlations between test items, histograms, QQ plots, and wafer map displays help you identify defect signs and outliers early.

2D correlation analysis: detect abnormal chips outside correlation trends by specifying upper and lower specification limits
Histogram gallery: compare measurement data distributions across multiple wafers
QQ plot gallery: review distribution distortion and outlier tendencies by wafer
Wafer map gallery: display spatial distributions across multiple wafers
Pass/Fail map gallery: visualize pass/fail distributions for each wafer

Basic Statistical Analysis

Calculate statistics such as mean, median, standard deviation, and IQR to detect defect signs and outliers from measurement data distributions.

  • Lot-level and wafer-level analysis
  • Visualization of measurement distributions
  • Wafer heat maps

Correlation Analysis

Review correlations between test items, processes, wafers, and lots to extract parameters associated with yield degradation.

  • Abnormal chip detection
  • Narrowing down root-cause candidates
  • Process feedback support

Visualization

Wafer maps, Pass/Fail maps, histograms, QQ plots, and category maps help you intuitively understand anomalies.

  • Visual understanding of anomalies
  • Shorter analysis time
  • Comparison across multiple wafers

Related

Drill down into local anomalies on the wafer

When spatial distribution anomalies appear, you can review details on the wafer map and area segmentation analysis page.

Go to Wafer Map Analysis